F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdDcs-Inactive 1 — Radial Cluster Tool

1 — Radial Cluster Tool Footprint 300 mm Standard

Procedure C is a more precise referee technique that uses a series of isothermal transient measurements and corrects for the same sources of error as Procedure B

as technology advances to smaller and smaller dimensions for the elements of high-density integrated circuits

this Standard can be applied to RF power deliver systems used in similar processing equipment for other high-tech industries (e

1 — Sensor/Actuator Network Common Device Model

F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdDcs-Inactive 1 — Radial Cluster ToolNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the internal pressure required to produce failure of fitting connections made of fluorocarbon materials. This method can be used to characterize tube fitting connections