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If differences should exist between the English version and a translation in any other language
SEMI C3 — Specifications for Gases
SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
1 The scope of this Standard is all grades of ammonium hydroxide used in the semiconductor industry
The purpose of this Standard is to define a comprehensive standard test sequence to derive particle-related qualification data for 25 cm (10 in
C06500 - SEMI C65 - Guide for Trimethylsilane (3MS), 99.995% Quality Revision:SEMI C65-0308 - Superseded If differences should exist betweenThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylsilane (3MS) used in the semiconductor industry. This Document covers guides for 3MS
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