E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) StdTpc-Chemical & Gas General Specifications orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。

orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。

SEMI E159 — Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

The purpose of this Standard is to provide a generally acceptable specification for communicating the quality of semiconductor equipment data

SEMI D67 — Test Methods for Antifouling Property and Chemical Resistance of FPD Polarizing Films and its Materials

Flat Panel Display - Factory Automation Global Technical Committee で技術的に承認されたもので，Korean Flat Panel Display Working Groupが直接責任を負うものである。現版は2004年11月24日Japan Regional Standards Committeeにて承認されている。2005年1月にまずwww

E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) StdTpc-Chemical & Gas General Specifications orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1