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1 This Guide provides a description of tools that can be used to determine these key parameters before
previously published July 2013
SEMI E111-0303E (editorial revision)
a mixed sample is used for analysis
本仕様は，
E16000 - SEMI E160 - Specification for Communication of Data Quality StdPbc-1125 1 This Guide provides a1 Purpose 1. 1 With the semiconductor industry deploying e Manufacturing, the data equipment generates is critical to improving equipment productivity. The quality of that reported data is of paramount importance to ensure successful use of software applications that use and or analyze the data. It impacts communications including SECS (SEMI Equipment Communications Standard) and Equipment Data Acquisition (EDA) interfaced systems. The purpose of this