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vehicle and carrier state models)
This composite model forms a complete interoperability standard for communications among intelligent sensors
This Document provided a common basis for communication between manufacturers and users
SEMI E90-1104 (technical revision)
SEMI E6-96 (technical revision)
G09200 - SEMI G92 - Specification for Tape Frame Cassette for 450 mm Wafer StdPbc-0915 vehicle and carrier state models)The purpose of this Standard is to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die bonding process. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the mechanical interfaces for the tape frame cassette are specified. Materials kinds
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