E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon quality control and manufacturing

quality control and manufacturing

Publication Date: Now Available

this Specification provides state models and scenarios that define the host interaction with the equipment for the following:

静電気放電（ESD： electrostatic discharge）は製品とレチクルに損傷を与える｡また，ESDイベントは電磁妨害（EMI： electromagnetic interference）を引き起こし，その結果，設備故障が発生する｡

This Test Method also describes use of a transfer sensor that is calibrated using a calorimeter and a working sensor that is calibrated using the transfer sensor

E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon quality control and manufacturing1 Purpose 1. 1 The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users. 2 Scope 2. 1 This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry. Referenced SEMI Standards