M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdPbc-1116 3 This Standard applies to

3  This Standard applies to semiconductor processing equipment RF power-delivery systems whose power is directly used to produce and sustain the plasma or is electrically connected to the plasma (i

SEMI G87-1108 (Reapproved 1020)

SEMI E174-0618 (technical revision)

SEMI E79-0221 (technical revision)

Each technology has unique strengths and weaknesses—some rely on front-surface illumination

M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdPbc-1116 3 This Standard applies toThis Practice covers a methodology to determine the costs associated with misclassification of product due to variability and bias of measurement equipment. These costs are associated with failing product that conforms with specifications and passing product that does not conform with specifications. This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user.