C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded and at other times as

and at other times as seems necessary

originally published in 1984

This Guide describes procedures for measuring filter particle retention while using UPW as the test media

within which the conductive vias will be constructed

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use

C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded and at other times asThis Document is a recommended guide to evaluate the efficacy of filter elements used in ultrapure water (UPW) fluid streams, providing particle control as risk mitigation for particle contamination on the wafer. Due to the lack of adequate on line particle detection metrology at the particle sizes addressed by this Guide, however off line filter performance testing can be used to validate filter retention efficiency. Off line filter performance